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LED Epitaxial Annealing Furnace
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Product: Views:390LED Epitaxial Annealing Furnace 
Unit price: Negotiable
Delivery date: Since the payment date Days delivery
Valid until: Long-term effective
Last updated: 2019-01-13 21:37

Full Chinese operation interface, parameters can be edited, easy to operate

Multiple process curves can be saved, and multiple steps can be set for each curve

Automatic operation control function of process curve

Automatic operation can be suspended/continue to run the function

The process can be forced to jump to the next step operation function

Intelligent rising temperature slope control function

PID parameter self-tuning function

Multiple sets of PID parameters can be stored for system operation to invoke functions

System fault detection and alarm function

System error correction (single point or multi-point dynamic correction function)

Intelligent cantilever push and pull boat control function

Process gas program control function (solenoid valve/mass flow controller)

Breakpoints continue to run after the power failure function and so on

The system can increase or decrease or develop corresponding functions according to the special requirements of users.

Working temperature: 200-1000 ℃ (maximum temperature less than 800 ℃)

Accuracy: + / - 1.0 ℃ or less

Constant temperature zone length: customized

Boot repeatability: plus or minus 1.0 ℃ or less

Cold vacuum degree: 10-1pa

Quartz vacuum indoor diameter: customized

Control instruments: original imported thermostat from shimao electric co., LTD

Ambient temperature: 10 ~ 45 ℃

Relative humidity: 85%

Power supply: three-phase five-wire 380V 10% 50Hz

Available atmosphere: H2, N2

Number of process pipes: 1~4 pipes/set;

U working temperature range: 200 ~ 1000 ℃;

Taken the constant temperature zone length and accuracy: 600 ~ 1000 ℃ of 300 ~ 900 mm + / - 0.5 ℃;

Taken the single point temperature stability: 600 ~ 1000 ℃ + / - 0.5 ℃ / 24 h.

Taken the largest controllable heating speed: 15 ℃ / min

Taken the maximum cooling speed: 15 ℃ / min